Integrated Long-Range Thermal Bimorph Actuators for Parallelizable Bio-AFM Applications
نویسندگان
چکیده
منابع مشابه
Simulation of a Buckled Cantilever Plate with Thermal Bimorph Actuators
INTRODUCTION: Micro Electro Mechanical Systems (MEMS) are fabricated with an in-plane fabrication technology. Out-of-plane structures can be designed to be assembled to provide thermal and electrical isolation from the substrate [1 -3]. These isolations can potentially improve the performance of a range of MEMS devices by decreasing any unwanted coupling effects or parasitic losses from the dev...
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ژورنال
عنوان ژورنال: IEEE Sensors Journal
سال: 2013
ISSN: 1530-437X,1558-1748
DOI: 10.1109/jsen.2013.2261293